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Suprasil 310

Suprasil 310 – Premium Synthetic Quartz Glass for deep UV Applications
Heraeus provides premium quartz glass tubes for UV and deep UV application with excellent visual quality. These tubes have a superior transmission and a significantly improved life-time compared to all other quartz grades. Supporting highest UV output over a very long operation time Suprasil 310 provide highest reliability for your products and lower operation costs.
Suprasil 310 is optimal for applications in deep UV.
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Applications:
  • surface cleaning in SC and LCD processing
  • photochemical vapour deposition
  • surface activation, photochemistry

Lamp Types:
  • 172 nm excimer lamps
  • very demanding long arc lamps
  • UV light guides

Properties of Suprasil 310:
  • highest purity
  • free of bubbles
  • highest UV transmission
  • resistant to short- wave UV radiation

Minimum Order Quantity:
5kg

Outer Diameter (OD)
OD-Range

 Tolerance*
2 – ≤ 8 mm ± 0.2 mm
> 8 – ≤ 17 mm ± 0.3 mm
> 17 – ≤ 25 mm ± 0.4 mm
> 25 – ≤ 30 mm ± 0.5 mm
> 30 – ≤ 35 mm ± 0.6 mm
> 35 – ≤ 40 mm ± 0.8 mm
*Other dimensions and tolerances on request.
Wall Thickness (WT)
WT-Range

 Tolerance*
≤ 1.2 mm
 ± 0.2 mm
> 1.2 - ≤ 2.0 mm
 ± 0.3 mm
> 2.0 - ≤ 2.8 mm
 ± 0.4 mm
> 2.8 - ≤ 3.7 mm
 ± 0.5 mm
> 3.7 - ≤ 4.5 mm ± 0.7 mm
*Other dimensions and tolerances on request.
Suprasil Family: Typical chemical impurities (ppm, µg/g) OH Content (ppm, µg/g)
Li Na K Mg Ca Fe Cu Cr Mn Al Ti Quality unannealed
0.01 0.05 0.01 0.005 0.05 0.02 0.01 0.005 0.005 0.05 0.05 Suprasil 310 200 - 300
*no change in the OH content by the annealing process

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